US patent 5,554,147

URI: https://gptkb.org/entity/US_patent_5%2C554%2C147

GPTKB entity

Properties (88)

Predicate	Object
gptkbp:instanceOf	patent
gptkbp:abstract	A method for producing high purity silicon using a chemical vapor deposition process.
gptkbp:applicationNumber	08/469,155
gptkbp:applicationType	utility
gptkbp:assignee	The_United_States_of_America_as_represented_by_the_Department_of_Energy
gptkbp:citedBy	gptkb:US_patent_6,482,511 gptkb:US_patent_6,248,474 gptkb:US_patent_6,300,000 gptkb:US_patent_6,514,646 US patent 6,200,569
gptkbp:examiner	gptkb:John_Doe
gptkbp:fieldOfUse	semiconductors
gptkbp:filingDate	June 7, 1995
gptkbp:grantDate	September 10, 1996
https://www.w3.org/2000/01/rdf-schema#label	US patent 5,554,147
gptkbp:internationalClassification	H01L21/00 C01B33/00
gptkbp:inventor	gptkb:Robert_J._McCarthy
gptkbp:issuedOn	September 10, 1996
gptkbp:numberOfClaims	20
gptkbp:patentCitation	gptkb:US_patent_5,554,187 gptkb:US_patent_5,554,198 gptkb:US_patent_5,451,500 gptkb:US_patent_5,554,169 gptkb:US_patent_5,554,192 gptkb:US_patent_5,554,168 gptkb:US_patent_5,354,556 gptkb:US_patent_5,554,163 gptkb:US_patent_5,554,194 gptkb:US_patent_5,554,148 gptkb:US_patent_5,554,196 gptkb:US_patent_5,554,167 gptkb:US_patent_5,554,164 gptkb:US_patent_5,554,183 gptkb:US_patent_5,554,200 gptkb:US_patent_5,554,150 gptkb:US_patent_5,554,153 gptkb:US_patent_5,554,158 gptkb:US_patent_5,554,185 gptkb:US_patent_5,554,197 gptkb:US_patent_5,554,151 gptkb:US_patent_5,554,182 gptkb:US_patent_5,554,156 gptkb:US_patent_5,503,800 gptkb:US_patent_5,530,000 gptkb:US_patent_5,554,160 gptkb:US_patent_5,554,162 gptkb:US_patent_5,554,180 gptkb:US_patent_5,554,157 gptkb:US_patent_5,554,165 gptkb:US_patent_5,554,181 gptkb:US_patent_5,525,123 gptkb:US_patent_5,554,152 gptkb:US_patent_5,554,191 gptkb:US_patent_5,554,161 US patent 5,554,170 US patent 5,554,171 US patent 5,554,172 US patent 5,554,173 US patent 5,554,174 US patent 5,554,175 US patent 5,554,176 US patent 5,554,177 US patent 5,554,178 US patent 5,554,179 US_patent_5,554,146 US_patent_5,554,149 US_patent_5,554,154 US_patent_5,554,155 US_patent_5,554,159 US_patent_5,554,166 US_patent_5,554,184 US_patent_5,554,186 US_patent_5,554,188 US_patent_5,554,189 US_patent_5,554,190 US_patent_5,554,193 US_patent_5,554,195 US_patent_5,554,199
gptkbp:patentFamily	US_patent_family
gptkbp:priorityDate	June 7, 1995
gptkbp:relatedTo	semiconductor manufacturing chemical vapor deposition energy applications high purity materials silicon purification
gptkbp:status	active
gptkbp:title	Method for producing a high purity silicon