US patent 5,554,194

URI: https://gptkb.org/entity/US_patent_5%2C554%2C194

GPTKB entity

Properties (66)

Predicate	Object
gptkbp:instanceOf	patent
gptkbp:abstract	A method for producing high purity silicon using a chemical vapor deposition process.
gptkbp:applicationNumber	08/469,174
gptkbp:applicationType	utility
gptkbp:assignee	The_United_States_of_America_as_represented_by_the_Department_of_Energy
gptkbp:citedBy	gptkb:US_patent_6,200,600 gptkb:US_patent_6,248,474 gptkb:US_patent_6,300,000 gptkb:US_patent_6,800,000 gptkb:US_patent_6,500,000
gptkbp:fieldOfUse	semiconductors
gptkbp:grantDate	September 10, 1996
https://www.w3.org/2000/01/rdf-schema#label	US patent 5,554,194
gptkbp:internationalClassification	H01L21/00 C01B33/38 C23C14/00
gptkbp:inventor	gptkb:Robert_J._McCarthy
gptkbp:issuedOn	September 10, 1996
gptkbp:legalStatus	active
gptkbp:numberOfClaims	20
gptkbp:patentCitation	gptkb:US_patent_7,500,000 gptkb:US_patent_8,400,000 gptkb:US_patent_6,600,000 gptkb:US_patent_7,300,000 gptkb:US_patent_6,100,000 gptkb:US_patent_8,200,000 gptkb:US_patent_5,800,000 gptkb:US_patent_7,700,000 gptkb:US_patent_5,500,000 gptkb:US_patent_5,300,000 gptkb:US_patent_5,400,000 gptkb:US_patent_8,700,000 gptkb:US_patent_5,900,000 gptkb:US_patent_6,000,000 gptkb:US_patent_8,300,000 gptkb:US_patent_6,700,000 gptkb:US_patent_6,300,000 gptkb:US_patent_8,100,000 gptkb:US_patent_8,000,000 gptkb:US_patent_8,900,000 gptkb:US_patent_6,900,000 gptkb:US_patent_5,700,000 gptkb:US_patent_6,800,000 gptkb:US_patent_6,400,000 gptkb:US_patent_7,000,000 gptkb:US_patent_7,400,000 gptkb:US_patent_6,200,000 gptkb:US_patent_8,500,000 gptkb:US_patent_6,500,000 gptkb:US_patent_7,800,000 gptkb:US_patent_8,600,000 gptkb:US_patent_9,000,000 gptkb:US_patent_7,200,000 gptkb:US_patent_5,600,000 gptkb:US_patent_7,900,000 gptkb:US_patent_8,800,000 gptkb:US_patent_7,600,000 gptkb:US_patent_7,100,000
gptkbp:patentFamily	US_patent_family
gptkbp:priorityDate	June 7, 1995
gptkbp:relatedTo	energy efficiency semiconductor manufacturing chemical vapor deposition high purity materials silicon purification
gptkbp:title	Method for producing a high purity silicon