Statements (28)
| Predicate | Object |
|---|---|
| gptkbp:instanceOf |
microfabrication process
|
| gptkbp:alternativeTo |
gptkb:UV-LIGA
gptkb:X-ray_LIGA |
| gptkbp:appliesTo |
gptkb:MEMS
microfluidics micromechanics micro-optics |
| gptkbp:developedBy |
gptkb:Germany
gptkb:Forschungszentrum_Karlsruhe |
| gptkbp:enables |
high aspect ratio microstructures
|
| gptkbp:feature |
smooth surfaces
submicron precision vertical sidewalls |
| https://www.w3.org/2000/01/rdf-schema#label |
LIGA process
|
| gptkbp:material |
gptkb:PMMA
gptkb:SU-8 nickel |
| gptkbp:standsFor |
Lithographie, Galvanoformung, Abformung
|
| gptkbp:step |
development
molding X-ray exposure electroforming |
| gptkbp:usedFor |
fabrication of microstructures
|
| gptkbp:uses |
molding
electroplating deep X-ray lithography |
| gptkbp:bfsParent |
gptkb:Microelectromechanical_systems
|
| gptkbp:bfsLayer |
7
|