Microelectromechanical systems
GPTKB entity
Statements (52)
| Predicate | Object |
|---|---|
| gptkbp:instanceOf |
gptkb:technology
|
| gptkbp:abbreviation |
gptkb:MEMS
|
| gptkbp:application |
biosensors
accelerometers actuators gyroscopes sensors inkjet printer heads pressure sensors microphones optical switches |
| gptkbp:component |
microelectronics
microactuators microsensors microfluidics microstructures |
| gptkbp:developedBy |
1980s
|
| gptkbp:feature |
mass production
batch fabrication high sensitivity low power consumption miniaturization integration of mechanical and electrical components |
| gptkbp:field |
gptkb:nanotechnology
engineering microfabrication |
| https://www.w3.org/2000/01/rdf-schema#label |
Microelectromechanical systems
|
| gptkbp:material |
gptkb:ceramics
metals polymers silicon |
| gptkbp:origin |
gptkb:United_States
|
| gptkbp:relatedStandard |
gptkb:IEEE_1076.1
gptkb:ISO/TS_80004-8 |
| gptkbp:relatedTo |
gptkb:NEMS
semiconductor devices microtechnology integrated circuits micromachining |
| gptkbp:standardProcess |
gptkb:LIGA_process
bulk micromachining deep reactive-ion etching surface micromachining |
| gptkbp:usedIn |
gptkb:consumer_electronics
aerospace automotive industry industrial automation telecommunications medical devices |
| gptkbp:bfsParent |
gptkb:IEEE_MEMS_Technical_Community
gptkb:MEMS_(Microelectromechanical_systems) |
| gptkbp:bfsLayer |
6
|