Statements (19)
| Predicate | Object |
|---|---|
| gptkbp:instanceOf |
microfabrication process
|
| gptkbp:advantage |
lower cost compared to X-ray LIGA
|
| gptkbp:application |
microactuators
microsensors micromolds |
| gptkbp:enables |
fabrication of metal microstructures
|
| https://www.w3.org/2000/01/rdf-schema#label |
UV-LIGA
|
| gptkbp:photoresistType |
thick photoresist
|
| gptkbp:relatedTo |
gptkb:LIGA_process
|
| gptkbp:standsFor |
Ultraviolet Lithographie, Galvanoformung, Abformung
|
| gptkbp:substrate |
gptkb:glass
silicon |
| gptkbp:usedFor |
gptkb:microelectromechanical_systems_(MEMS)
high aspect ratio microstructures |
| gptkbp:uses |
molding
electroplating ultraviolet (UV) lithography |
| gptkbp:bfsParent |
gptkb:LIGA_process
|
| gptkbp:bfsLayer |
8
|