Statements (13)
| Predicate | Object |
|---|---|
| gptkbp:instanceOf |
microfabrication process
|
| gptkbp:developedBy |
gptkb:Germany
|
| gptkbp:enables |
high aspect ratio structures
production of precise microcomponents |
| https://www.w3.org/2000/01/rdf-schema#label |
X-ray LIGA
|
| gptkbp:involves |
molding
electroforming |
| gptkbp:usedFor |
fabrication of high-aspect-ratio microstructures
|
| gptkbp:usedIn |
MEMS fabrication
|
| gptkbp:uses |
X-ray lithography
thick photoresist |
| gptkbp:bfsParent |
gptkb:LIGA_process
|
| gptkbp:bfsLayer |
8
|