MEMS

GPTKB entity
AI-created image of MEMS
AI-created image

Statements (51)
Predicate Object
gptkbp:instanceOf gptkb:technology
gptkbp:alternativeName micromachines
microsystems technology
gptkbp:application accelerometers
actuators
gyroscopes
sensors
biomedical devices
inkjet printer heads
micro-mirrors
pressure sensors
gptkbp:component microelectronics
microactuators
micromechanical structures
microsensors
gptkbp:conference gptkb:IEEE_International_Conference_on_MEMS
gptkbp:countryOfOrigin gptkb:Japan
gptkb:United_States
gptkbp:developedBy late 1980s
gptkbp:fabricationProcess gptkb:engraver
deposition
doping
photolithography
gptkbp:feature mass production
batch fabrication
high sensitivity
low cost
low power consumption
miniaturization
integration of mechanical and electrical components
gptkbp:field microtechnology
gptkbp:governingBody gptkb:IEEE_MEMS_Technical_Community
gptkbp:hasJournal gptkb:Journal_of_Microelectromechanical_Systems
https://www.w3.org/2000/01/rdf-schema#label MEMS
gptkbp:material gptkb:ceramics
metals
polymers
silicon
gptkbp:relatedTo gptkb:nanotechnology
gptkb:NEMS
semiconductor industry
gptkbp:size micrometer scale
gptkbp:standsFor gptkb:Micro-Electro-Mechanical_Systems
gptkbp:usedIn gptkb:consumer_electronics
aerospace
automotive industry
industrial automation
telecommunications
medical devices
gptkbp:bfsParent gptkb:DARPA
gptkbp:bfsLayer 4