precursorGas

URI: https://gptkb.org/prop/precursorGas
7 triples
GPTKB property
Random triples
Subject Object
gptkb:Low-Pressure_CVD_(LPCVD) gptkb:silane_(SiH4)
gptkb:Low-Pressure_CVD_(LPCVD) gptkb:dichlorosilane_(SiH2Cl2)
gptkb:Low_Pressure_CVD_(LPCVD) ammonia
gptkb:Low-Pressure_CVD_(LPCVD) gptkb:phosphine_(PH3)
gptkb:Low_Pressure_CVD_(LPCVD) dichlorosilane
gptkb:Low_Pressure_CVD_(LPCVD) silane
gptkb:Low-Pressure_CVD_(LPCVD) ammonia (NH3)