Scanning Electron Microscopy
GPTKB entity
Statements (51)
| Predicate | Object |
|---|---|
| gptkbp:instanceOf |
Microscopy technique
|
| gptkbp:abbreviation |
gptkb:SEM
|
| gptkbp:canAchieveMagnification |
up to 1,000,000x
|
| gptkbp:canBe |
gptkb:X-rays
backscattered electrons secondary electrons |
| gptkbp:combines |
gptkb:Electron_Backscatter_Diffraction
Energy Dispersive X-ray Spectroscopy |
| gptkbp:detects |
chemical composition
surface morphology crystallographic information |
| gptkbp:developedBy |
1930s
|
| gptkbp:firstCommercialInstrument |
1965
|
| https://www.w3.org/2000/01/rdf-schema#label |
Scanning Electron Microscopy
|
| gptkbp:inventedBy |
gptkb:Manfred_von_Ardenne
|
| gptkbp:limitation |
cannot image living samples
sample charging sample damage by electron beam requires conductive coating for non-conductive samples |
| gptkbp:manufacturer |
gptkb:FEI
gptkb:Hitachi gptkb:JEOL gptkb:Zeiss |
| gptkbp:operatesIn |
high vacuum
low vacuum (variable pressure SEM) |
| gptkbp:produces |
elemental maps
3D-like images high depth of field images |
| gptkbp:provides |
topographical information
compositional information |
| gptkbp:relatedTo |
gptkb:Light_Microscopy
gptkb:Transmission_Electron_Microscopy |
| gptkbp:requires |
detectors
electron source vacuum environment sample preparation conductive samples sample stage scanning coils |
| gptkbp:resolution |
nanometer scale
|
| gptkbp:signature |
biological samples (after coating)
non-biological samples |
| gptkbp:usedFor |
imaging sample surfaces
|
| gptkbp:usedIn |
gptkb:nanotechnology
biology materials science semiconductors forensics |
| gptkbp:uses |
electron beam
|
| gptkbp:bfsParent |
gptkb:Electron_Microscopy
|
| gptkbp:bfsLayer |
7
|