Auger Electron Spectroscopy

URI: https://gptkb.org/entity/Auger_Electron_Spectroscopy
GPTKB entity
Statements (40)
Predicate Object
gptkbp:instanceOf gptkb:surface_analysis_technique
gptkbp:abbreviation gptkb:AES
gptkbp:advantage quantitative analysis
high spatial resolution
elemental mapping
gptkbp:analyzes surface layers
gptkbp:basedOn gptkb:Auger_effect
gptkbp:combines gptkb:Scanning_Electron_Microscopy
Focused Ion Beam
gptkbp:commercialized 1960s
gptkbp:detects Auger electrons
gptkbp:discoveredBy 1925
gptkbp:limitation surface sensitivity
charging effects on insulators
limited detection of light elements
gptkbp:measures kinetic energy of electrons
gptkbp:namedAfter gptkb:Pierre_Auger
gptkbp:output Auger spectrum
gptkbp:provides elemental composition
chemical state information
gptkbp:relatedTo gptkb:X-ray_Photoelectron_Spectroscopy
gptkb:Electron_Energy_Loss_Spectroscopy
gptkb:Secondary_Ion_Mass_Spectrometry
gptkbp:requires ultra-high vacuum
conductive sample or coating
gptkbp:typicalDepth 1-10 nanometers
gptkbp:usedFor depth profiling
thin film analysis
elemental analysis
surface chemical analysis
gptkbp:usedIn gptkb:nanotechnology
materials science
semiconductor industry
surface engineering
corrosion studies
gptkbp:uses electron beam
X-ray beam
gptkbp:bfsParent gptkb:X-ray_Photoelectron_Spectroscopy
gptkbp:bfsLayer 7
https://www.w3.org/2000/01/rdf-schema#label Auger Electron Spectroscopy