Electron Backscatter Diffraction

GPTKB entity

Statements (51)
Predicate Object
gptkbp:instanceOf Materials characterization technique
gptkbp:abbreviation EBSD
gptkbp:analyzes gptkb:ceramics
metals
minerals
thin films
polycrystalline materials
single crystals
Kikuchi patterns
gptkbp:appliesTo geology
materials science
metallurgy
semiconductor industry
gptkbp:detects backscattered electrons
gptkbp:developedBy 1990s
gptkbp:enables microstructure analysis
texture analysis
deformation analysis
grain boundary characterization
identification of inclusions
identification of precipitates
identification of twins
phase transformation studies
recrystallization studies
gptkbp:firstDemonstrated 1992
https://www.w3.org/2000/01/rdf-schema#label Electron Backscatter Diffraction
gptkbp:inventedBy David Dingley
gptkbp:measures crystal orientation
grain size
misorientation angles
phase distribution
gptkbp:output orientation imaging microscopy (OIM) data
gptkbp:provides grain boundary maps
orientation maps
phase maps
gptkbp:relatedTo X-ray diffraction
Electron Channeling Pattern
Transmission Kikuchi Diffraction
gptkbp:requires gptkb:electron_microscope
detector
electron beam
polished sample surface
tilted sample (typically 70 degrees)
gptkbp:resolution ~50 nm
gptkbp:usedFor crystallographic analysis
phase identification
texture analysis
grain orientation mapping
gptkbp:usedIn gptkb:Scanning_Electron_Microscopy
gptkbp:bfsParent gptkb:Grain_Boundaries_in_Metals
gptkbp:bfsLayer 7