Electron Backscatter Diffraction
GPTKB entity
Statements (51)
Predicate | Object |
---|---|
gptkbp:instanceOf |
Materials characterization technique
|
gptkbp:abbreviation |
EBSD
|
gptkbp:analyzes |
gptkb:ceramics
metals minerals thin films polycrystalline materials single crystals Kikuchi patterns |
gptkbp:appliesTo |
geology
materials science metallurgy semiconductor industry |
gptkbp:detects |
backscattered electrons
|
gptkbp:developedBy |
1990s
|
gptkbp:enables |
microstructure analysis
texture analysis deformation analysis grain boundary characterization identification of inclusions identification of precipitates identification of twins phase transformation studies recrystallization studies |
gptkbp:firstDemonstrated |
1992
|
https://www.w3.org/2000/01/rdf-schema#label |
Electron Backscatter Diffraction
|
gptkbp:inventedBy |
David Dingley
|
gptkbp:measures |
crystal orientation
grain size misorientation angles phase distribution |
gptkbp:output |
orientation imaging microscopy (OIM) data
|
gptkbp:provides |
grain boundary maps
orientation maps phase maps |
gptkbp:relatedTo |
X-ray diffraction
Electron Channeling Pattern Transmission Kikuchi Diffraction |
gptkbp:requires |
gptkb:electron_microscope
detector electron beam polished sample surface tilted sample (typically 70 degrees) |
gptkbp:resolution |
~50 nm
|
gptkbp:usedFor |
crystallographic analysis
phase identification texture analysis grain orientation mapping |
gptkbp:usedIn |
gptkb:Scanning_Electron_Microscopy
|
gptkbp:bfsParent |
gptkb:Grain_Boundaries_in_Metals
|
gptkbp:bfsLayer |
7
|