MEMS (Microelectromechanical systems)

URI: https://gptkb.org/entity/MEMS_(Microelectromechanical_systems)
GPTKB entity
Statements (51)
Predicate Object
gptkbp:instanceOf gptkb:technology
microsystem
gptkbp:abbreviation gptkb:Microelectromechanical_systems
gptkbp:alternativeName micromachines
microsystems technology
gptkbp:application biosensors
accelerometers
gyroscopes
inkjet printer heads
pressure sensors
RF switches
microphones
optical switches
gptkbp:component microelectronics
microactuators
microsensors
microstructures
gptkbp:countryOfOrigin gptkb:United_States
gptkbp:developedBy late 1980s
gptkbp:fabricationProcess gptkb:engraver
deposition
doping
photolithography
gptkbp:field gptkb:nanotechnology
microfabrication
https://www.w3.org/2000/01/rdf-schema#label MEMS (Microelectromechanical systems)
gptkbp:material gptkb:ceramics
metals
polymers
silicon
gptkbp:notableCompany gptkb:Murata_Manufacturing
gptkb:Texas_Instruments
gptkb:Bosch
gptkb:Qualcomm
gptkb:STMicroelectronics
gptkb:Analog_Devices
gptkbp:relatedTo gptkb:NEMS_(Nanoelectromechanical_systems)
semiconductor devices
integrated circuits
gptkbp:size micrometer
sub-micrometer
gptkbp:standardizedBy gptkb:IEEE
gptkb:MEMS_Industry_Group
gptkbp:usedIn gptkb:consumer_electronics
aerospace
automotive industry
industrial automation
telecommunications
medical devices
gptkbp:bfsParent gptkb:Defense_Advanced_Research_Projects_Agency_(DARPA)
gptkbp:bfsLayer 5