Random triples
Subject | Object |
---|---|
gptkb:Microelectromechanical_systems | deep reactive-ion etching |
gptkb:Microelectromechanical_systems | surface micromachining |
gptkb:Microelectromechanical_systems | gptkb:LIGA_process |
gptkb:Microelectromechanical_systems | bulk micromachining |