Random triples
| Subject | Object |
|---|---|
| gptkb:Microelectromechanical_systems | bulk micromachining |
| gptkb:Microelectromechanical_systems | deep reactive-ion etching |
| gptkb:Microelectromechanical_systems | surface micromachining |
| gptkb:Microelectromechanical_systems | gptkb:LIGA_process |