Random triples
| Subject | Object |
|---|---|
| gptkb:Atomic_Layer_Deposition_(ALD) | metal-organic precursors |
| gptkb:Atomic_Layer_Deposition_(ALD) | gaseous precursors |
| gptkb:Atomic_Layer_Deposition | gaseous precursors |
| gptkb:Atomic_Layer_Deposition_(ALD) | inorganic precursors |
| gptkb:Atomic_Layer_Deposition | inorganic precursors |
| gptkb:Atomic_Layer_Deposition | metal-organic precursors |