microelectromechanical systems
GPTKB entity
Statements (52)
| Predicate | Object |
|---|---|
| gptkbp:instanceOf |
gptkb:technology
|
| gptkbp:abbreviation |
gptkb:MEMS
|
| gptkbp:application |
biosensors
accelerometers actuators gyroscopes sensors inkjet printer heads pressure sensors microphones optical switches |
| gptkbp:component |
microelectronics
microactuators microsensors microstructures |
| gptkbp:developedBy |
late 1980s
|
| gptkbp:fabricationProcess |
gptkb:engraver
deposition doping photolithography |
| gptkbp:feature |
mass production
batch fabrication high sensitivity low cost low power consumption miniaturization integration of mechanical and electrical components |
| gptkbp:field |
gptkb:nanotechnology
microtechnology |
| https://www.w3.org/2000/01/rdf-schema#label |
microelectromechanical systems
|
| gptkbp:inventedBy |
gptkb:Harvey_C._Nathanson
gptkb:Kurt_Petersen gptkb:Roger_Howe |
| gptkbp:material |
metals
polymers silicon |
| gptkbp:relatedStandard |
gptkb:IEEE_2700
|
| gptkbp:relatedTo |
gptkb:nanoelectromechanical_systems
semiconductor devices microsystems technology integrated circuits microfabrication |
| gptkbp:standardizedBy |
gptkb:IEEE
gptkb:MEMS_Industry_Group |
| gptkbp:usedIn |
gptkb:consumer_electronics
aerospace automotive industry telecommunications medical devices |
| gptkbp:bfsParent |
gptkb:Casimir_effect
gptkb:Martin_A._Schmidt |
| gptkbp:bfsLayer |
5
|