nanoelectromechanical systems
GPTKB entity
Statements (28)
| Predicate | Object |
|---|---|
| gptkbp:instanceOf |
gptkb:technology
|
| gptkbp:abbreviation |
gptkb:NEMS
|
| gptkbp:application |
gptkb:signal_processing
actuators sensors resonators |
| gptkbp:feature |
high sensitivity
low power consumption high frequency operation integrated electrical and mechanical functionality nanoscale components |
| gptkbp:field |
gptkb:nanotechnology
electrical engineering mechanical engineering |
| https://www.w3.org/2000/01/rdf-schema#label |
nanoelectromechanical systems
|
| gptkbp:relatedTo |
gptkb:microelectromechanical_systems
nanomaterials nanoelectronics nanofabrication nanomechanics |
| gptkbp:usedIn |
communications
mass spectrometry biomedical devices quantum devices RF filters |
| gptkbp:bfsParent |
gptkb:IEEE_International_Conference_on_MEMS
gptkb:microelectromechanical_systems |
| gptkbp:bfsLayer |
6
|