micro-electro-mechanical systems
GPTKB entity
Statements (50)
| Predicate | Object |
|---|---|
| gptkbp:instanceOf |
gptkb:technology
|
| gptkbp:abbreviation |
gptkb:MEMS
|
| gptkbp:application |
biosensors
accelerometers actuators gyroscopes sensors inkjet printer heads pressure sensors microphones optical switches |
| gptkbp:component |
microelectronics
microactuators microsensors micromechanics |
| gptkbp:developedBy |
1960s
|
| gptkbp:fabricationProcess |
gptkb:engraver
deposition doping photolithography |
| gptkbp:field |
microtechnology
|
| https://www.w3.org/2000/01/rdf-schema#label |
micro-electro-mechanical systems
|
| gptkbp:material |
gptkb:ceramics
metals polymers silicon |
| gptkbp:relatedStandard |
gptkb:IEEE_1076.1
|
| gptkbp:relatedTo |
gptkb:nanotechnology
gptkb:SOI_(Silicon_on_Insulator) gptkb:NEMS gptkb:lab-on-a-chip semiconductor devices integrated circuits microfluidics microfabrication smart sensors bulk micromachining surface micromachining RF MEMS BioMEMS MEMS foundry MEMS packaging |
| gptkbp:size |
micrometer
|
| gptkbp:usedIn |
gptkb:consumer_electronics
aerospace automotive industry telecommunications medical devices |
| gptkbp:bfsParent |
gptkb:Reconfigurable_Optical_Add-Drop_Multiplexer
|
| gptkbp:bfsLayer |
7
|