microelectromechanical systems (MEMS)
GPTKB entity
Statements (49)
| Predicate | Object |
|---|---|
| gptkbp:instanceOf |
gptkb:technology
miniaturized device |
| gptkbp:alternativeName |
micromachines
microsystems technology |
| gptkbp:application |
accelerometers
gyroscopes biomedical devices inkjet printer heads pressure sensors RF switches microphones optical switches |
| gptkbp:component |
microelectronics
microactuators microsensors |
| gptkbp:countryOfOrigin |
gptkb:Germany
gptkb:Japan gptkb:United_States |
| gptkbp:developedBy |
1960s
|
| gptkbp:enables |
mass production
low power consumption cost reduction miniaturization of devices integration of mechanical and electrical systems |
| gptkbp:fabricationProcess |
gptkb:engraver
deposition doping photolithography |
| gptkbp:field |
gptkb:nanotechnology
microtechnology |
| https://www.w3.org/2000/01/rdf-schema#label |
microelectromechanical systems (MEMS)
|
| gptkbp:material |
metals
polymers silicon |
| gptkbp:notableContributor |
Kurt E. Petersen
|
| gptkbp:relatedTo |
gptkb:NEMS
integrated circuits |
| gptkbp:size |
micrometer
sub-micrometer |
| gptkbp:standard_organization |
gptkb:IEEE
gptkb:MEMS_Industry_Group |
| gptkbp:used_in |
gptkb:consumer_electronics
aerospace automotive industry telecommunications medical devices |
| gptkbp:bfsParent |
gptkb:SEMI
gptkb:Low-Pressure_CVD_(LPCVD) |
| gptkbp:bfsLayer |
7
|