Random triples
| Subject | Object |
|---|---|
| gptkb:Silicon_Nitride_Deposition | High Dielectric Strength |
| gptkb:Silicon_Nitride_Deposition | High Mechanical Strength |
| gptkb:Silicon_Nitride_Deposition | Good Barrier to Diffusion |
| gptkb:Silicon_Nitride_Deposition | Low Etch Rate in HF |