Statements (27)
| Predicate | Object |
|---|---|
| gptkbp:instanceOf |
gptkb:electron_microscope
|
| gptkbp:advantage |
higher resolution than conventional SEM
lower beam energy reduced sample damage |
| gptkbp:canBe |
failure analysis
particle size analysis surface morphology analysis elemental analysis (with EDS/EDX) |
| gptkbp:hasComponent |
gptkb:electron_gun
detector vacuum chamber condenser lens scanning coils |
| https://www.w3.org/2000/01/rdf-schema#label |
field emission SEM
|
| gptkbp:obtainedFrom |
nanometer-scale resolution
|
| gptkbp:produces |
backscattered electrons
secondary electrons |
| gptkbp:requires |
high vacuum
|
| gptkbp:signature |
conductive samples
coated non-conductive samples |
| gptkbp:usedFor |
high-resolution imaging
|
| gptkbp:usedIn |
gptkb:nanotechnology
biology materials science |
| gptkbp:uses |
field emission electron source
|
| gptkbp:bfsParent |
gptkb:electron_microscope
|
| gptkbp:bfsLayer |
5
|