Statements (21)
| Predicate | Object |
|---|---|
| gptkbp:instanceOf |
gptkb:Process
|
| gptkbp:appliesTo |
Vacuum Chambers
Vacuum Components |
| gptkbp:commonIn |
Ultra-high vacuum systems
|
| gptkbp:duration |
Several hours to days
|
| gptkbp:effect |
Improves vacuum quality
|
| gptkbp:method |
Heating under vacuum
|
| gptkbp:purpose |
Reduce outgassing
Remove adsorbed gases |
| gptkbp:relatedTo |
gptkb:Particle_Accelerators
Surface Science Semiconductor Manufacturing Space Simulation |
| gptkbp:removes |
Water vapor
Hydrocarbons Other contaminants |
| gptkbp:temperature |
100-400°C
|
| gptkbp:usedIn |
Vacuum Technology
|
| gptkbp:bfsParent |
gptkb:Vacuum_Technique
|
| gptkbp:bfsLayer |
8
|
| https://www.w3.org/2000/01/rdf-schema#label |
Vacuum Bakeout
|