Through-Silicon Via (TSV)

GPTKB entity

Statements (42)
Predicate Object
gptkbp:instanceOf gptkb:microprocessor
vertical electrical connection
gptkbp:alternativeTo wire bonding
flip-chip technology
gptkbp:challenge reliability
cost
thermal stress
yield loss
gptkbp:enables gptkb:AI_accelerators
gptkb:3D_NAND
data centers
high-performance computing
mobile devices
lower power consumption
multi-chip modules
high bandwidth interconnects
reduced form factor
shorter interconnect lengths
vertical stacking of dies
gptkbp:fabricationProcess deep reactive-ion etching
copper electroplating
https://www.w3.org/2000/01/rdf-schema#label Through-Silicon Via (TSV)
gptkbp:introducedIn early 2000s
gptkbp:material copper
tungsten
gptkbp:relatedTo heterogeneous integration
2.5D integration
fan-out wafer-level packaging
system-in-package (SiP)
gptkbp:standardizedBy gptkb:JEDEC
gptkbp:usedBy gptkb:Samsung
gptkb:Intel
gptkb:TSMC
Micron
gptkbp:usedIn gptkb:HBM_(High_Bandwidth_Memory)
image sensors
MEMS devices
advanced packaging
3D integrated circuits
logic-memory integration
gptkbp:bfsParent gptkb:Package_on_Package_(PoP)
gptkbp:bfsLayer 7