SEMI International Standards

GPTKB entity

Statements (26)
Predicate Object
gptkbp:instanceOf gptkb:International_Standard
gptkbp:developedBy SEMI (Semiconductor Equipment and Materials International)
gptkbp:firstPublished 1973
gptkbp:focusesOn gptkb:microelectromechanical_systems_(MEMS)
semiconductor manufacturing
flexible electronics
photovoltaics
flat panel display manufacturing
gptkbp:governingBody SEMI International Standards Program
https://www.w3.org/2000/01/rdf-schema#label SEMI International Standards
gptkbp:notableFor SEMI E30 (GEM)
SEMI E5 (SECS-I)
SEMI F47 (Voltage Sag Immunity)
SEMI M1 (Silicon Wafer Specification)
SEMI S2 (Environmental, Health, and Safety)
gptkbp:purpose to ensure interoperability and quality in manufacturing
gptkbp:reviewedBy industry volunteers
gptkbp:standardNumber over 1000
gptkbp:updated regularly
gptkbp:usedIn equipment manufacturing
materials manufacturing
device manufacturing
global semiconductor industry
gptkbp:website https://www.semi.org/en/standards
gptkbp:bfsParent gptkb:SEMI
gptkbp:bfsLayer 7