Rutherford backscattering spectrometry
GPTKB entity
Statements (50)
| Predicate | Object |
|---|---|
| gptkbp:instanceOf |
analytical technique
|
| gptkbp:abbreviation |
gptkb:RBS
|
| gptkbp:alternativeTo |
gptkb:X-ray_fluorescence
secondary ion mass spectrometry |
| gptkbp:analyzes |
energy spectrum
solid samples |
| gptkbp:basedOn |
gptkb:Rutherford_scattering
|
| gptkbp:canDistinguish |
isotopes (in some cases)
|
| gptkbp:complement |
elastic recoil detection analysis
nuclear reaction analysis particle induced X-ray emission |
| gptkbp:dataAnalysis |
gptkb:simulation
RUMP SIMNRA |
| gptkbp:depthResolution |
nanometer scale
|
| gptkbp:detectionLimit |
~0.1 atomic percent
|
| gptkbp:detects |
backscattered ions
|
| gptkbp:developedBy |
1960s
|
| https://www.w3.org/2000/01/rdf-schema#label |
Rutherford backscattering spectrometry
|
| gptkbp:limitation |
limited sensitivity for light elements
limited lateral resolution |
| gptkbp:measures |
stoichiometry
layer thickness impurity concentration |
| gptkbp:namedAfter |
gptkb:Ernest_Rutherford
|
| gptkbp:nonDestructive |
true
|
| gptkbp:provides |
concentration
atomic mass depth distribution |
| gptkbp:range |
1-3 MeV
|
| gptkbp:relatedTo |
nuclear physics
surface science |
| gptkbp:requires |
particle physics experiment
vacuum environment detector for scattered ions |
| gptkbp:resolution |
millimeter scale
|
| gptkbp:typicalIon |
gptkb:proton
helium ion |
| gptkbp:usedFor |
material analysis
depth profiling elemental composition determination thin film characterization |
| gptkbp:usedIn |
archaeology
geology materials science semiconductor industry |
| gptkbp:uses |
energetic ions
ion beams |
| gptkbp:bfsParent |
gptkb:Michigan_Ion_Beam_Laboratory
|
| gptkbp:bfsLayer |
7
|