Statements (21)
| Predicate | Object |
|---|---|
| gptkbp:instanceOf |
gptkb:smartphone
|
| gptkbp:canBe |
solid-state
vacuum tube based |
| gptkbp:connects |
load
matching network |
| gptkbp:controls |
output frequency
output power |
| https://www.w3.org/2000/01/rdf-schema#label |
RF power supply
|
| gptkbp:monitors |
power meter
frequency meter |
| gptkbp:output |
alternating current
|
| gptkbp:output_frequency_range |
kHz to GHz
|
| gptkbp:requires |
cooling system
|
| gptkbp:used_in |
medical devices
semiconductor manufacturing industrial heating plasma generation RF sputtering |
| gptkbp:usedFor |
generating radio frequency power
|
| gptkbp:bfsParent |
gptkb:Plasma-Enhanced_CVD_(PECVD)
|
| gptkbp:bfsLayer |
7
|