MEMS (Micro-Electro-Mechanical Systems)
GPTKB entity
Statements (52)
| Predicate | Object |
|---|---|
| gptkbp:instanceOf |
gptkb:technology
microtechnology |
| gptkbp:abbreviation |
gptkb:Micro-Electro-Mechanical_Systems
|
| gptkbp:component |
gptkb:Internet_of_Things
biomedical devices wearable technology automotive systems RF switches microphones optical switches |
| gptkbp:developedBy |
1960s
|
| gptkbp:enables |
mass production
low power consumption miniaturization cost reduction high integration density |
| gptkbp:fabricationProcess |
gptkb:engraver
deposition photolithography micromachining |
| gptkbp:hasApplication |
aerospace
defense healthcare industrial automation robotics telecommunications optical communications environmental monitoring consumer products |
| https://www.w3.org/2000/01/rdf-schema#label |
MEMS (Micro-Electro-Mechanical Systems)
|
| gptkbp:material |
gptkb:ceramics
metals polymers silicon |
| gptkbp:relatedTo |
gptkb:NEMS_(Nano-Electro-Mechanical_Systems)
semiconductor devices integrated circuits |
| gptkbp:standardizedBy |
gptkb:IEEE
gptkb:MEMS_Industry_Group |
| gptkbp:usedIn |
gptkb:consumer_electronics
medical devices accelerometers actuators gyroscopes sensors smartphones inkjet printer heads pressure sensors automotive airbags |
| gptkbp:bfsParent |
gptkb:MEMS_Industry_Group
gptkb:SiTime_Corporation |
| gptkbp:bfsLayer |
7
|