Statements (15)
| Predicate | Object |
|---|---|
| gptkbp:instanceOf |
probe station
|
| gptkbp:application |
failure analysis
IC characterization device measurement |
| gptkbp:component |
gptkb:electron_microscope
chuck manipulator probe arms |
| https://www.w3.org/2000/01/rdf-schema#label |
EPS probe station
|
| gptkbp:manufacturer |
gptkb:EPS
|
| gptkbp:used_in |
microelectronics research
wafer probing |
| gptkbp:usedFor |
semiconductor testing
|
| gptkbp:bfsParent |
gptkb:Cascade_Microtech
|
| gptkbp:bfsLayer |
8
|