high-k metal gate

GPTKB entity

Statements (20)
Predicate Object
gptkbp:instanceOf gptkb:microprocessor
gptkbp:composedOf high dielectric constant material
metal gate electrode
gptkbp:enables gptkb:Moore's_Law_scaling
lower power consumption
smaller transistor sizes
gptkbp:example hafnium oxide
https://www.w3.org/2000/01/rdf-schema#label high-k metal gate
gptkbp:improves device performance
gptkbp:introduced gptkb:Intel
gptkbp:introducedIn 2007
gptkbp:reduces gate leakage current
gptkbp:replacedBy silicon dioxide gate dielectric
gptkbp:usedBy gptkb:Samsung_Electronics
gptkb:TSMC
gptkb:GlobalFoundries
gptkbp:usedIn 45nm process technology
CMOS transistors
gptkbp:bfsParent gptkb:IBM_Microelectronics
gptkbp:bfsLayer 6