WaferSense

GPTKB entity

Statements (21)
Predicate Object
gptkbp:instanceOf product line
gptkbp:application process monitoring
equipment diagnostics
tool qualification
gptkbp:dataRate real-time
gptkbp:firstReleased 2005
gptkbp:formFactor wafer-shaped
gptkbp:function wireless measurement device
https://www.w3.org/2000/01/rdf-schema#label WaferSense
gptkbp:industry gptkb:microprocessor
gptkbp:manufacturer gptkb:CyberOptics_Corporation
gptkbp:measures gptkb:temperature
humidity
vibration
leveling
airborne particles
gptkbp:usedIn semiconductor manufacturing
gptkbp:website https://www.cyberoptics.com/products/semiconductor/wafer-sense/
gptkbp:wireless true
gptkbp:bfsParent gptkb:CyberOptics
gptkbp:bfsLayer 7