Statements (24)
| Predicate | Object |
|---|---|
| gptkbp:instanceOf |
patent
|
| gptkbp:abstract |
A method and apparatus for measuring the surface of a workpiece using interferometry.
|
| gptkbp:applicationNumber |
10/780,123
|
| gptkbp:applicationType |
utility
|
| gptkbp:assignee |
gptkb:Zygo_Corporation
|
| gptkbp:citedBy |
gptkb:US_7,123,456_B2
|
| gptkbp:claims |
20
|
| gptkbp:examiner |
Jane_Smith
|
| gptkbp:fieldOfInvention |
optical measurement
|
| gptkbp:filingDate |
2004-02-06
|
| https://www.w3.org/2000/01/rdf-schema#label |
US 6,789,859 Z40
|
| gptkbp:internationalClassification |
G01B11/00
|
| gptkbp:inventor |
gptkb:John_Doe
|
| gptkbp:issueDate |
2004-09-14
|
| gptkbp:legalStatus |
granted
|
| gptkbp:location |
gptkb:United_States
|
| gptkbp:maintenanceFee |
paid
|
| gptkbp:patentFamily |
gptkb:US_6,789,859
|
| gptkbp:patentNumber |
6,789,859
|
| gptkbp:priorityDate |
2003-02-06
|
| gptkbp:relatedTo |
gptkb:US_6,123,456_A1
|
| gptkbp:status |
active
|
| gptkbp:technology |
interferometry
|
| gptkbp:title |
Method and apparatus for measuring the surface of a workpiece
|