US 6,789,587 D3

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gptkbp:abstract A method for improving efficiency in a process.
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gptkbp:fieldOfInvention Engineering
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gptkbp:patentNumber 6,789,587
gptkbp:patentType Design
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gptkbp:status Active
gptkbp:subclass H01L_21/01
gptkbp:title Method for improving efficiency