Statements (15)
| Predicate | Object |
|---|---|
| gptkbp:instanceOf |
gptkb:US_patent
|
| gptkbp:application |
gptkb:US06/563,073
|
| gptkbp:assignee |
gptkb:Hitachi_Ltd
|
| gptkbp:country |
gptkb:United_States
|
| gptkbp:fieldOfInvention |
semiconductor device manufacturing
|
| gptkbp:filingDate |
1983-12-28
|
| https://www.w3.org/2000/01/rdf-schema#label |
US4591071A
|
| gptkbp:inventedBy |
gptkb:Kazuo_Iizuka
|
| gptkbp:language |
English
|
| gptkbp:priorityDate |
1982-12-28
|
| gptkbp:publicationDate |
1986-05-27
|
| gptkbp:status |
Expired
|
| gptkbp:title |
Method for producing a semiconductor device
|
| gptkbp:bfsParent |
gptkb:Super_Soaker
|
| gptkbp:bfsLayer |
7
|