Statements (16)
| Predicate | Object |
|---|---|
| gptkbp:instanceOf |
gptkb:US_patent
|
| gptkbp:application |
gptkb:US05/862,370
|
| gptkbp:assignee |
gptkb:Hitachi_Ltd
|
| gptkbp:country |
gptkb:United_States
|
| gptkbp:fieldOfInvention |
semiconductor device manufacturing
|
| gptkbp:filingDate |
1977-12-19
|
| https://www.w3.org/2000/01/rdf-schema#label |
US4200770A
|
| gptkbp:inventedBy |
gptkb:Kazuo_Sato
|
| gptkbp:language |
English
|
| gptkbp:priorityDate |
1976-12-20
|
| gptkbp:publicationDate |
1980-04-29
|
| gptkbp:status |
granted
|
| gptkbp:title |
Method for producing a semiconductor device
|
| gptkbp:bfsParent |
gptkb:US4428063A
gptkb:US4575330A |
| gptkbp:bfsLayer |
7
|