Statements (26)
| Predicate | Object |
|---|---|
| gptkbp:instanceOf |
gptkb:software
|
| gptkbp:developedBy |
gptkb:Synopsys
|
| gptkbp:documentation |
available from Synopsys
|
| gptkbp:hasModel |
gptkb:engraver
diffusion lithography deposition annealing oxidation ion implantation |
| https://www.w3.org/2000/01/rdf-schema#label |
Sentaurus Process
|
| gptkbp:integratesWith |
gptkb:Sentaurus_Device
gptkb:Sentaurus_Visual |
| gptkbp:license |
proprietary
|
| gptkbp:output |
device structure files
|
| gptkbp:partOf |
Sentaurus TCAD suite
|
| gptkbp:platform |
gptkb:Windows
gptkb:Linux |
| gptkbp:SIM |
semiconductor fabrication steps
|
| gptkbp:supports |
3D process simulation
2D process simulation |
| gptkbp:usedBy |
semiconductor engineers
|
| gptkbp:usedFor |
semiconductor process simulation
|
| gptkbp:usedIn |
device fabrication research
|
| gptkbp:bfsParent |
gptkb:Sentaurus
|
| gptkbp:bfsLayer |
7
|