Statements (16)
| Predicate | Object |
|---|---|
| gptkbp:instanceOf |
robotic device
|
| gptkbp:component |
wafer handling system
|
| gptkbp:controlledBy |
automation system
|
| gptkbp:feature |
repeatability
contamination control precision movement |
| gptkbp:function |
transfers wafers between process chambers
|
| https://www.w3.org/2000/01/rdf-schema#label |
Sample Transfer Arm
|
| gptkbp:material |
gptkb:steel
aluminum |
| gptkbp:operatesIn |
vacuum environments
cleanroom environments |
| gptkbp:used_in |
semiconductor manufacturing
vacuum systems |
| gptkbp:bfsParent |
gptkb:Mars_Sample_Return_(planned)
|
| gptkbp:bfsLayer |
6
|