Statements (8)
| Predicate | Object |
|---|---|
| gptkbp:instanceOf |
photolithography mask
|
| gptkbp:appliesTo |
integrated circuit fabrication
|
| https://www.w3.org/2000/01/rdf-schema#label |
L5 (Level) mask
|
| gptkbp:purpose |
pattern transfer
|
| gptkbp:technology |
photolithography
|
| gptkbp:usedIn |
semiconductor manufacturing
|
| gptkbp:bfsParent |
gptkb:Laws'_Texture_Energy_Measures
|
| gptkbp:bfsLayer |
8
|