Statements (33)
| Predicate | Object |
|---|---|
| gptkbp:instanceOf |
materials science process
|
| gptkbp:alternativeTo |
thermal diffusion
|
| gptkbp:amendedBy |
surface layer of materials
|
| gptkbp:can_change |
electrical properties
mechanical properties optical properties |
| gptkbp:can_introduce |
impurities
|
| gptkbp:canBe |
surface hardening
biocompatibility enhancement corrosion resistance improvement wear resistance improvement |
| gptkbp:cause |
crystal lattice damage
|
| gptkbp:developedBy |
1950s
|
| https://www.w3.org/2000/01/rdf-schema#label |
Ion implantation
|
| gptkbp:involves |
accelerated ions
ion beam |
| gptkbp:often_followed_by |
annealing
|
| gptkbp:relatedTo |
ion beam analysis
plasma immersion ion implantation |
| gptkbp:requires |
gptkb:vacuum
mass analyzer accelerator ion source target chamber |
| gptkbp:used_in |
integrated circuit manufacturing
metal finishing semiconductor device fabrication solar cell fabrication biomedical device modification |
| gptkbp:usedFor |
doping
modifying material properties |
| gptkbp:bfsParent |
gptkb:Tandem_accelerator
|
| gptkbp:bfsLayer |
6
|