Statements (22)
Predicate | Object |
---|---|
gptkbp:instanceOf |
dual-beam electron microscope
|
gptkbp:component |
focused ion beam column
scanning electron microscope column |
gptkbp:feature |
high-resolution imaging
automated workflows energy-dispersive X-ray spectroscopy sample preparation precise material removal 3D tomography electron backscatter diffraction gas injection system |
https://www.w3.org/2000/01/rdf-schema#label |
Helios NanoLab
|
gptkbp:manufacturer |
gptkb:FEI_Company
|
gptkbp:marketedAs |
gptkb:Thermo_Fisher_Scientific
|
gptkbp:releaseYear |
2006
|
gptkbp:usedFor |
scanning electron microscopy
focused ion beam milling |
gptkbp:usedIn |
materials science
semiconductor research nanofabrication |
gptkbp:bfsParent |
gptkb:FEI_Company
|
gptkbp:bfsLayer |
7
|