Statements (9)
| Predicate | Object |
|---|---|
| gptkbp:instanceOf |
gptkb:chemical_compound
|
| gptkbp:contains |
chemical additives
abrasive particles |
| https://www.w3.org/2000/01/rdf-schema#label |
GSX slurry
|
| gptkbp:manufacturer |
Cabot Microelectronics
|
| gptkbp:usedFor |
chemical mechanical planarization
|
| gptkbp:usedIn |
semiconductor manufacturing
|
| gptkbp:bfsParent |
gptkb:Daisy_cutter
|
| gptkbp:bfsLayer |
6
|