Excimer Laser

GPTKB entity

Statements (49)
Predicate Object
gptkbp:instanceOf Laser
gptkbp:application gptkb:Laser_Surgery
Microfabrication
Photolithography
Laser Ablation
gptkbp:benefits High Cost
Environmental Concerns
Limited Lifespan
Requires Specialized Training
Complex Operation
gptkbp:characteristics High Precision
Short Pulse Duration
High Repetition Rate
Low Thermal Damage
Non-thermal Ablation
Wide Range of Wavelengths
High_Peak_Power
gptkbp:coolingSystem Water Cooling
gptkbp:duration Nanoseconds
gptkbp:energyEfficiency Low Efficiency
gptkbp:fuelType gptkb:Argon
gptkb:Krypton
Neon
Xenon
gptkbp:future_plans Increased Efficiency
Miniaturization
New Applications
Improved Safety Features
Integration with Other Technologies
https://www.w3.org/2000/01/rdf-schema#label Excimer Laser
gptkbp:inventor 1970s
gptkbp:maintenance Regular Maintenance Required
gptkbp:marketedAs Surface Treatment
Semiconductor Manufacturing
Laser Marking
Eye Surgery
Laser Etching
gptkbp:powerOutput High Power
Electrical_Discharge
gptkbp:produces gptkb:IBM
Ultraviolet Light
gptkbp:range 193 nm to 351 nm
gptkbp:research_areas Biomedical Engineering
Material Science
Optoelectronics
Plasma_Physics
gptkbp:safety Eye Protection Required
gptkbp:type Gas Laser
gptkbp:uses Gases