Excimer Laser

GPTKB entity

Statements (26)
Predicate Object
gptkbp:instanceOf gptkb:laser
gptkbp:category ultraviolet laser
gas laser
gptkbp:commonGasMixtures argon fluoride
krypton fluoride
xenon chloride
gptkbp:emits ultraviolet light
gptkbp:feature short pulse duration
high peak power
high photon energy
non-thermal ablation
https://www.w3.org/2000/01/rdf-schema#label Excimer Laser
gptkbp:inventedBy 1970
Gennady Zhdanov
Johan J. Ewing
Nikolai Basov
gptkbp:notableFor gptkb:LASIK
photolithography
gptkbp:pumpingMethod electric discharge
gptkbp:usedIn eye surgery
semiconductor manufacturing
micromachining
gptkbp:uses excited dimer molecules
gptkbp:wavelengthRange 193 nm to 351 nm
gptkbp:bfsParent gptkb:Laser_Technology
gptkbp:bfsLayer 7