Statements (21)
| Predicate | Object |
|---|---|
| gptkbp:instanceOf |
extreme ultraviolet radiation
|
| gptkbp:abbreviation |
extreme ultraviolet
|
| gptkbp:absorbedBy |
gptkb:Earth's_atmosphere
|
| gptkbp:discoveredIn |
20th century
|
| https://www.w3.org/2000/01/rdf-schema#label |
EUV
|
| gptkbp:producedBy |
synchrotron radiation
laser-produced plasma |
| gptkbp:relatedTo |
gptkb:soft_X-rays
ultraviolet light |
| gptkbp:requires |
vacuum for transmission
|
| gptkbp:usedIn |
gptkb:astronomy
plasma physics EUV lithography semiconductor lithography |
| gptkbp:wavelengthRange |
10 nm to 121 nm
|
| gptkbp:bfsParent |
gptkb:Viadrina_University
gptkb:Vertrag_von_Maastricht gptkb:ICON_mission gptkb:extreme_ultraviolet_lithography_(EUV) gptkb:Viadrina |
| gptkbp:bfsLayer |
6
|