Statements (30)
| Predicate | Object |
|---|---|
| gptkbp:instanceOf |
surface-sensitive analytical technique
|
| gptkbp:alsoKnownAs |
gptkb:AES
|
| gptkbp:analyzes |
Auger electrons
|
| gptkbp:appliesTo |
materials science
semiconductor industry surface engineering thin film analysis corrosion studies |
| gptkbp:basedOn |
gptkb:Auger_effect
|
| gptkbp:detects |
chemical state
elemental composition surface structure all elements except hydrogen and helium |
| gptkbp:developedBy |
1950s
|
| https://www.w3.org/2000/01/rdf-schema#label |
Auger electron spectroscopy
|
| gptkbp:namedAfter |
gptkb:Pierre_Auger
|
| gptkbp:provides |
quantitative analysis
depth profiling elemental mapping |
| gptkbp:relatedTo |
gptkb:X-ray_photoelectron_spectroscopy
secondary ion mass spectrometry |
| gptkbp:requires |
ultra-high vacuum
|
| gptkbp:sensitivityDepth |
1-10 nanometers
|
| gptkbp:usedFor |
surface chemical analysis
|
| gptkbp:uses |
electron beam
electron energy analyzer |
| gptkbp:bfsParent |
gptkb:Auger_effect
gptkb:X-ray_fluorescence gptkb:photoelectron_spectroscopy |
| gptkbp:bfsLayer |
6
|