Statements (23)
Predicate | Object |
---|---|
gptkbp:instanceOf |
patent
|
gptkbp:abstract |
A method for producing high purity silicon using a chemical vapor deposition process.
|
gptkbp:applicationNumber |
07/370,174
|
gptkbp:applicationType |
Utility
|
gptkbp:assignee |
The_United_States_of_America_as_represented_by_the_Department_of_Energy
|
gptkbp:citedBy |
gptkb:US_patent_5,456,789
gptkb:US_patent_5,123,456 gptkb:US_patent_5,234,567 gptkb:US_patent_5,345,678 |
gptkbp:fieldOfUse |
semiconductors
|
gptkbp:grantDate |
June 4, 1991
|
https://www.w3.org/2000/01/rdf-schema#label |
US patent 5,021,997
|
gptkbp:internationalClassification |
C01B33/38
|
gptkbp:inventor |
gptkb:Robert_J._McCarthy
|
gptkbp:issuedOn |
June 4, 1991
|
gptkbp:maintenanceFee |
Paid
|
gptkbp:numberOfClaims |
20
|
gptkbp:priorityDate |
March 31, 1989
|
gptkbp:relatedTo |
chemical vapor deposition
high purity materials silicon purification |
gptkbp:status |
Expired
|
gptkbp:title |
Method for producing a high purity silicon
|