Statements (13)
| Predicate | Object |
|---|---|
| gptkbp:instanceOf |
patent
|
| gptkbp:abstract |
A method for measuring the surface profile of a workpiece using interferometry.
|
| gptkbp:applicationNumber |
10/703,155
|
| gptkbp:assignee |
gptkb:Zygo_Corporation
|
| gptkbp:citedBy |
gptkb:US_7,123,456_B2
|
| gptkbp:claims |
20
|
| gptkbp:effectiveDate |
September 14, 2004
|
| gptkbp:fieldOfInvention |
optical measurement
|
| https://www.w3.org/2000/01/rdf-schema#label |
US 6,789,870 Z-1
|
| gptkbp:inventor |
gptkb:David_A._H._Houghton
|
| gptkbp:priorityDate |
March 31, 2003
|
| gptkbp:status |
active
|
| gptkbp:title |
Method and apparatus for measuring the surface profile of a workpiece
|